1062
Customized Static-Dissipative DLC Coating
In response to the electrostatic damage risks caused by linewidth scaling below 20 nm in advanced semiconductor processes, Hans-tech, Trusval, and ITRI have formed a tripartite industry-academia collaboration. By integrating advanced PVD technology with an improved magnetic furnace arc ion system, we have jointly developed a surface-modified diamond-like carbon coating (ESD-DLC). This coating addresses the limitations of existing products, such as poor electrostatic dissipation, short lifespan, high costs, and dependence on external technologies.
Features
Stable electrical performance
The DLC coating has a surface resistivity between 10^5 and 10^10 ohms/sq, complying with the ANSI/ESD S541 standard for electrostatic dissipative materials.
Applicable Metal Substrates
Primarily used on various metal carriers and workpiece surfaces, providing long-lasting and stable electrostatic dissipation.
Improves Limitations of Conventional Products
Coating Specifications
| Specification | Description | Features |
|---|---|---|
| Coating Color | Black, Dark Gray, Glossy / Matte | Surface Blackening |
| Technology | Cathodic Arc Deposition | Dense, 3D Coating, Low Contamination, Cost-effective |
| Structure | Multi-layer Design | Excellent Adhesion, With coating toughness |
| Thickness | 3-10 µm | No Impact on Original Dimensions |
| Surface Resistivity | 10^5-10^10 ohm | Stable quality, Customized service |
| Heat Resistance | Max. 250-300 ℃ | Applicable to high-temperature environments |
| Coating Hardness | 12-25 GPa | Wear-resistant, Prolongs service life |
| Applicable Objects | Substrates, fixtures, nozzles, suction heads, Clamps, robotic arms, gaskets, etc. | Suitable for stainless steel, carbon steel, aluminum alloy, and most conductive materials |
| Industry Applications | Semiconductor, IC packaging and testing, inspection and transfer equipment components, etc. | High ESD protection required; products or processes sensitive to ESD. |
Differences in Coating Properties
| FIELD1 | ESD-DLC PVD |
|---|---|
| Thickness | 3-10 µm |
| Density | Excellent |
| Adhesion | Excellent |
| Surface Resistivity | Tunable |
| Resistance Uniformity | Good |
| Coating Hardness (GPa) | 12-20 |
| Heat Resistance | > 250℃ |
